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BAWL-12AS Automatic Focusing Wafer Inspection System
BAWL-12AS Automatic Focusing Wafer Inspection System
BAWL-12AS Automatic Focusing Wafer Inspection System
BAWL-12AS Automatic Focusing Wafer Inspection System
BAWL-12AS Automatic Focusing Wafer Inspection System
BAWL-12AS Automatic Focusing Wafer Inspection System

BAWL-12AS Automatic Focusing Wafer Inspection System

Introduction

The BAWL-12AS features and excellent optical imaging system, enabling high-definition capture of micro details on wafers. With a versatile macro inspection module and a flexible and easy-to-use remote-control joystick, it enables multi-angle, full-field macro inspection, making it an efficient tool for wafer defect analysis.

Details

Model:BAWL-12AS
Wafer Size:200mm/300mm
Eyepiece:PL10X
Objectives:5X/10X/20X/50X/100X
Illumination:12V/10W LED
Focusing:5X objective automatic pre focus
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Overview

Packaging & Delivery:

Packaging Details:Strong Carton with Polyfoam Protection

Port:Beijing

Lead Time:Within 2-4 Weeks after Receiving Payment

Introduction

Equipped with a fully automated wafer handling system, achieving efficient macro/micro inspection. The BAWL-12AS features and excellent optical imaging system, enabling high-definition capture of micro details on wafers. With a versatile macro inspection module and a flexible and easy-to-use remote-control joystick, it enables multi-angle, full-field macro inspection, making it an efficient tool for wafer defect analysis. BAWL-12AS provide leading semiconductor process optical inspection solutions.

Feature

1.EFEM system

The EFEM system is equipped with automatic loading and unloading modules and is compatible with various wafer sizes. It is an essential component of wafer inspection equipment. In a highly clean environment, individual wafers are transferred to the inspection module through a precision mechanical arm. The core components include the loadport, wafer transport robot, and wafer aligner.

 

The advanced loadport can open and close FOUP lids, and it can also be equipped with barcode scanners and RFID reading functions. The efficient recognition system can quickly and accurately identify different wafer cassette types, such as FOUP, FOSB, and Open Cassette.

 

8 inch Open Cassette

 

12 inch FOSB

 

12 inch FOUP

 

 

2.Mapping

Using a high-precision optical detection system, wafers are scanned layer by layer to record wafer position information. It can quickly and accurately identify tilted or misaligned wafers and provide alarms for abnormal states, achieving 100% accuracy.

 

Cassette Mapping: Standard

 

Oblique Insertion

 

3.High-precision wafer pre-alignment

A non—contact optical method is used to locate the center and notch/flat of the wafer.

 

The fully automated intelligent pre-alignment mechanism achieves accurate and fast positioning of the inspection target. It’s more efficient in operation and more precise in data collection.

 

Suitable for various wager materials such as Si, SIC, EMC, Glass, etc.

 

 

 

4.Macro Inspection

The BAWL-12AS includes a macro inspection are that can perform a 360° rotation for macro inspection of wafer surfaces and backs, making it easy to detect defects and particles on the front, black, and edge sides of the wafer. The wafer can be tilted for observation using the control lever. By rotating and tilting the wager at multiple angles, the entire front, back, and edge of the wafer can be visually inspected. Various light sources, including yellow and green, are available to accommodate different working conditions.

 

Surface macro inspection

 

Surface macro inspection

 

Edge inspection

 

Backside inspection

 

5.Precision optical micro inspection

Using a wide-beam imaging system, it supports a world-leading ultra-wide field of view of 25mm, providing a new experience of large-field vision.

 

The optical system is equipped with a polarizing system with polarizing and differential interference contrast imaging systems for high contrast, high-resolution micro-imaging.

 

5X Bright Field

 

10X Bright Field

 

20X Bright Field

 

50X Bright Field

 

100X Bright Field

 

5X Dark Field

 

10X Dark Field

 

20X Dark Field

 

50X Dark Field

 

100X Dark Field

 

6.Precision optical electric components

The equipment’s objective and aperture diaphragm are controlled by an automatic electric control system. The control buttons are in front of the equipment platform, making them easily accessible.

 

The user-friendly electric design not only avoids frequent manual operations but also make your inspection work more precise and flexible. Controls within reach, helping you improve efficiency.

 

7.Professional APO objective with infinite long working distance

The long working distance BD plan semi-apochromatic metallurgical objectives satisfy observation methods such as bright field, dark field, polarization and DIC. The brightness enhancement of the image in the dark field improves the detection ability of the sample. This series of objective strictly selects high transmittance lenses and advanced coating technology to truly restore the natural color of the sample. The bright and dark field objective is made of special process materials, which greatly reduces weight and contributes to preventing environmental pollution and improving the controllability of objective conversion. The semi-apochromatic design has excellent color correction performance, improving the contrast and clarity of observed images. Long working distance objective lenses are widely used in various testing fields, easily achieving non-destructive testing.

 

8.Advanced image analysis software

The image processing software, equipped with hardware accessories such as electric platform, electric Z-axis, electric converter, and light source control, supports automatic large image stitching, depth fusion, automatic focusing, 3D measurement, and is compatible with 64-bit Windows systems.

 

Functions including: auto focus, light source control, electronic control function, measurement module, image library management, depth fusion, particle counting, image stitching, 3D view, 3D measurement.

 

9.Data communication system

The wafer inspection system supports the SECS/GEM semiconductor standard communication protocol, acting as a communication bridge between the equipment and customer MES and other host systems, enabling functions such as work order issuance, material accounting, process recording, and remote control.

 

The system is equipped with a user-friendly human-machine interface system, making it easy to operate and monitor wafer workstations in real time.

 

It can recognize various wafer cassette types and is equipped with a high-precision wafer OCR reader. With the unique ID of each wafer, it monitors the entire process data of the wafer. It allows data extraction, modification, and change of the inspection work more efficient and reliable.

 

The system is compatible with power outage protection devices, allowing the equipment to maintain IPC system operation for 15 minutes in case of power outage, providing enough time for data saving.

 

 

10.Reliability

The BAWL-12MS wafer inspection system has high stability and transmission rate. The system uses a safety design compliant with SEMI standards, with built-in UPS uninterruptible power supply, a vacuum holding system, an efficient and stable dual-arm mechanical arm, and various safety interlock functions. It safely and reliably places wafer or warped wafers at various equipment workstation sites.

 

Specification

 

Item

Specification

BAWL-12MS

BAWL-12AS

BAWL-12RAS

Wafer Size

200mm/300mm

Wafer Thickness

250-1000um/300-1000um

Type of Cassette

FOUP, FOSB/Smif Pod/Open Cassette

Loadport

1 Port

 

 

1 Port/2 Ports

 

Cassette Mapping

Standard

FOUP RFID Reader

Standard

Docking with Crown Block

Docking with the crown block

 

Robot

Dual arm robotic arm

Pre-Aligner Type

Non-contact centering

Wafer ID OCR

Wafer ID OCR

Macro Inspection

Top surface/Edge/Backside

Macro Inspection Photography

Macro inspection photography function

 

Macro Illumination

LED, white, yellow and green for optional

Device dimension

2400mm(W)*1400mm(D)*2350mm(H) (1 port)

2400mm(W)*2050mm(D)*2350mm(H) (2 port)

 

FFU

FFU

ESD Static Elimination System

ESD Static Elimination System

UPS

Uninterruptible power supply

Power

Single-phase 220v 50Hz 16A

 

Single-phase 220V 50Hz 32A

 

 

CDA

0.4~0.6Mpa

VAC

-70KPA~-90KPA

Optical System

Infinity Color Correction Optical System

Observation method

Bright field/Dark Field/Polarization/DIC

Eyepiece

High eyepoint wide field plan eyepiece PL10X/25mm, micrometer and adjustable diopter for optional

Viewing head

5-35° adjustable, erect image, tilting trinocular head, interpupillary distance: 50-76mm, splitting ratio R:T=100:0 or 0:100

Objectives

Long working distance BD plan semi-apochromatic metallurgical objectives 5X/10X/20X/50X/100X

Nosepiece

Electric sextuple bright and dark field nosepiece, with DIC slot

Focusing

Manual focusing

 

 

5X objective automatic pre focus

 

 

Real time focusing

 

Illumination

Bright and dark field illumination for reflected, with field diaphragm and electric variable aperture, with switch device of bright and dark field, with slots for filters and polarizing attachment, with 12V/10W LED lamp house

Stage

12 inches mechanical stage with low position coaxial adjustment in X/Y axis. Wafer holder stage: Φ70mm, 360° rotatable. Observation range: 305mm*305mm. With clutch handle.

 

 

12 inches fully automatic stage, adjustable in X, Y, Z and Φ directions. Wafer holder stage: Φ70mm, 360° rotatable. Observation range: 310mm*310mm, ±5° rotatable on Φ direction, the moving speed on each axis can be switched between high and low speeds.

 

 

12 inches fully automatic high precision stage, adjustable in X, Y, Z and Φ directions. Wafer holder stage: Φ70mm, 360° rotatable. Observation range: 310mm*310mm, ±5° rotatable on Φ direction, the moving speed on each axis can be switched between high and low speeds.

 

 

Emap System

Wafer Emap system including visual positioning

 

Wafer Review System

Wafer review system

 

 

Import & Export

Klarf file import and export

 

 

SECS-GEM

Semiconductor Equipment Communication Standard/Generic Equipment Model

Others

Filters

Polarizer and analyzer

DIC kit

C-mount adapter

Camera

Professional software for wafer inspection

Note: ● Standard Outfit, ○ Optional

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