BESC-50T High Vacuum Evaporation and Sputtering Coater
Introduction
Details
Overview
Packaging & Delivery
Packaging Details:Strong Carton with Polyfoam Protection
Port:Beijing
Lead Time:Within 2-4 Weeks after Receiving Payment
Introduction
Feature
1.Available in both magnetron sputtering and evaporation mode for metal and carbon coating.
2.Two modes can be switched by one click, no need to exchange target kit.
3.Easy operation with fully automatic controland touch screen.
4.Anti-pollution design, avoidingcross contamination while working under two different mode
5.Initial time before ready to work is less than 10 minutes, best vacuum 5*10-3Pa.
6.Suitable for a wide variety of samples under high resolution observation.
Specification
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Technical Parameters |
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Dimensions |
470mm (L)*396mm (D)*404mm(H) |
Display |
7 Inches Color Touch Screen, digital display |
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Target |
All metal target, parts of compound |
Size of Target |
Ф57mm |
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Sputter Current |
2-200mA continuously adjustable |
Sputter Time |
1-999s, continuously adjustable |
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Evap. Source |
High purity carbon fiber (Ф0.8mm) |
Qty. of Source |
4 |
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Evap. Mode |
Continuous evaporation & pulse evaporation |
Evap. Source status |
Auto detect, operate and display |
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Chamber |
Borosilicate glass Ф200*130mm |
Working Gas |
High purity argon (≥4N) |
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Pumps |
TMP + Rotary pump |
Pumping speed |
90L/s + 1.1L/s |
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Initial Time |
Less than 5 mins |
Best Vacuum |
≤5* 10-3Pa |
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Stage |
Ф125mm |
Stage Rotary speed |
4-20rpm adjustable |
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Power Supply |
AC220V/1000W |
Vacuum Adjustment |
Automatically |
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Pre puttering |
Pre-sputtering baffle, automatically control |
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Protection function |
Vacuum protection, over-current protection, over-voltage protection, TMP overheating protection etc. |
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Anti-pollution |
Anti-pollution unit, avoid cross contamination between magnetron sputtering module and evaporation module. |
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Optional |
Thickness gauge, measurement accuracy 0.1nm, film thickness setting range:1-999nm each time, max range of measurement: 10um |
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Packing Size |
Total 2 cartons, 1 carton of main machine: 60cm*51cm*55cm, gross weight: 60 kg. 1 carton of vacuum pump: 69cm*30cm*39cm, gross weight: 32 kg |
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